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TT: Fachverband Tiefe Temperaturen

TT 15: Superconductivity: Poster Session

TT 15.52: Poster

Dienstag, 26. Februar 2008, 14:00–18:00, Poster B

Microfabrication of magnetic calorimeters — •Stefan Lausberg, Andreas Pabinger, Andreas Burck, Christian Domesle, Christan Höhn, Sebastian Kempf, Lena Maerten, Christian Pies, Jan-Patrick Porst, Sönke Schäfer, Richard Weldle, Thomas Wolf, Loredana Fleischmann, Andreas Fleischmann, and Christian Enss — Kirchhoff-Institut für Physik, Universität Heidelberg, INF 227, D-69120 Heidelberg, Germany

Metallic magnetic calorimeters (MMCs) detect the energy of particles by measuring the heat input into a metallic absorber that is thermally well connected to a paramagnetic Au:Er sensor. The sensor is situated in a weak magnetic field. An incident particle deposits energy inside the absorber and heats up the sensor which results in a change of magnetization. This change is proportional to the particle energy and is read out by a SQUID magnetometer. For large area MMCs, the magnetic field is generated by a microstructured meander shaped niobium coil. A persistent current can be frozen in this structure producing an inhomogeneous field in the region of the sensor, which is directly sputtered on top. Both the sputtering of Au:Er sensors with thermodynamical properties that agree with the ones of bulk material as well as the deposition of niobium films with high critical currents are crucial process steps for the microfabrication of MMC detectors with high resolution power. We give a detailed description of the two processes that we presently use for microfabrication of MMC detectors and discuss the achieved results.