Berlin 2008 – scientific programme

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 2: Vacuum pumps and gauges

VA 2.2: Talk

Monday, February 25, 2008, 12:20–12:40, H 0106

Partial Pressure Measurement — •Andreas Schopphoff — Pfeiffer Vacuum GmbH, Berliner Str. 43, 35614 Asslar

Partial pressure gauges are essential tools to generate a better knowledge of the state of vacuum. Typical applications are leak detection and residual gas analysis. One of the most often used partial pressure gauge is the quadrupole mass spectrometer. Because of its small size and the high performance it is used in multiple applications. The general operation of a quadrupole mass spectrometer will be discussed in this presentation.