Darmstadt 2008 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 16: Schwerionen- und lasererzeugte Plasmen I

P 16.2: Vortrag

Donnerstag, 13. März 2008, 16:45–17:00, 3D

Ly-spectra of dense, laser-induced Li-Plasmas — •Sonja Lorenzen, Gerd Röpke, and August Wierling — Institut für Physik, Universität Rostock, Germany

Laser-induced plasmas are a bright source for EUV light. The Ly-α line of LiIII at 13.5 nm is of particular interest to EUV-lithography. In this talk we present results for the width and broadening of the Ly-α line based on a quantum statistical approach. In particular, the role of pressure broadening for the line profile is discussed. Improvements for the static ionic microfields are developed beyond the Hooper scheme. Taking into account radiation transport within an one-layer approximation, density and temperature conditions are inferred for various experimental measurements. In order to estimate the conversion rate, the complete Ly-spectrum is determined for the conditions of a typical laser-induced plasma.