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P: Fachverband Plasmaphysik

P II: Poster: Niedertemperaturplasmen, Plasmatechnologie

P II.10: Poster

Dienstag, 11. März 2008, 11:00–13:00, Poster C3

Numerical Modeling of Electron Heating in the Plasma Boundary Sheath — •Brian G. Heil¹, Julian Schulze¹, Thomas Mussenbrock², Ralf Peter Brinkmann², Dirk Luggenhölscher¹, and Uwe Czarnetzki¹ — ¹Institut für Experimentalphysik V, Ruhr-Universität Bochum, D-44780 Bochum, Deutschland — ²Lehrstuhl für Theoretische Elektrotechnik, Ruhr-Universität Bochum, D-44780 Bochum, Deutschland

The stochastic heating of electrons by the RF plasma boundary sheath is not fully understood and is a current research topic. A conceptually simple Monte-Carlo simulation has been developed as an aid in interpreting experimental studies of electron kinetics in the sheath. Energetic electron beams accelerated by the sheath have been observed both experimentally, through the measurement of phase resolved plasma emissions, and with this simulation. At lower pressures, the sheath current and hence the effective sheath edge velocity is modulated by the PSR (Plasma Series Resonance) effect. This non-linear modulation affects the electron beams and is important in understanding stochastic heating.

This research has been supported by: SFB 591, GK 1051.