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P: Fachverband Plasmaphysik
P III: Poster: Diagnostik, Theorie, Schwerionen- und lasererzeugte Plasmen, Sonstiges
P III.10: Poster
Dienstag, 11. März 2008, 11:00–13:00, Poster C3
Luminescent micro-particles as thermal plasma probes — •Horst Maurer1, Holger Kersten2, and Ralf Basner1 — 1INP Greifswald, Felix Hausdorff - Str. 2, 17489 Greifswald, Germany — 2IEAP, University of Kiel, Leibnitzstr. 19, 24118 Kiel, Germany
The equilibrium temperature of micro-particles, immersed in a plasma, is determined by the sum of several energy fluxes between the surrounding plasma and the particle surface. The surface temperature of particles is crucial in etching and deposition processes as well as in surface modification and catalytic properties and a proper technique for spatial resolved temperature measurements would be desirable. Furthermore, flux densities can be influenced by the variation of gas composition and plasma parameters, thus giving access to verify existing plasma models.
The principle of a non-invasive temperature measurement is presented, using luminescent phosphor particles. Some suitable phosphors were found, which show temperature dependent features of radiation. Those features will be discussed with respect to their feasibility for particle temperature measurements in plasma, and first experimental results will be presented.
The plasma reactor PULVA-INP is particularly suitable for parametric measurements of particle temperatures inside the plasma. An adaptive electrode, which consists of more than 100 pixels, each of which can be impinged on a distinct DC-voltage, enables modifying the sheath and manipulating immersed phosphor particles in real time.