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SYLM: Symposium Lasermaterialbearbeitung

SYLM 3: Abtragen und Strahlführung

SYLM 3.1: Hauptvortrag

Donnerstag, 13. März 2008, 08:30–09:00, 2B/C

High quality micro machining with temporal and spacial tailored ultra short laser pulses — •Arnold Gillner, Claudia Hartmann, Andreas Dohrn, and Stefan Beckemper — Fraunhofer-Institut für Lasertechnik, Aachen, Deutschland

In the production of micro-scaled products and products with micro and nano scaled surface functionalities, laser ablation becomes an important tool which is able to generate structure sizes in the range of 10 - 100 micrometer and with new machining strategies even in range smaller than one micrometer. One crucial task for all laser machining applications is the realisation of a high surface quality with a minimum of roughness and with no thermal effect on the geometry of the part. Using tailored ultra short laser pulses with pulse durations of 10 ps in pulse bursts of several pulses with a time spacing of 20 ns each and adapted pulse energies, the surface quality of metal micro ablation have been increased significantly. Compared to single pulse ablation, the roughness has been decreased by a factor of 2 and at the same time the ablation efficiency has been increased up to a factor of 4. Using interference methods with multiple beam interference structure sizes of less than 200 nm can be achieved. By transferring this technology to the production of micro moulds a cost effective and flexible way for the generation of functional parts with micro and nano sized structures is available.