Darmstadt 2008 – wissenschaftliches Programm
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SYLM: Symposium Lasermaterialbearbeitung
SYLM 4: Strahlführung II und Nanostrukturierung
SYLM 4.3: Hauptvortrag
Donnerstag, 13. März 2008, 12:00–12:30, 2B/C
Near infrared 80 MHz femtosecond laser nanoprocessing — Karsten Koenig1,2, Aisada Uchugonova2, Iris Riemann2, Ronan LeHarzic1,2, and •Jens Müller3 — 1Saarland University, Faculty of Mechatronics&Physics, Campus, 66123 Saarbruecken — 2Fraunhofer IBMT, Ensheimer Strasse 48, 66386 St. Ingbert — 3JenLab GmbH, Schillerstrasse 1, 07745 Jena
Intense near infrared MHz femtosecond laser pulses at transient TW/cm2 intensities and low pJ/nJ pulse energies can be used to perform material processing based on multiphoton ionization and plasma formation. Cut sizes of sub-wavelength, sub-100 nm which is far beyond the Abbe diffraction limit can be realized without any collateral damage effect. This technology has been used for nanodissection of human chromosomes, targeted transfection of human stem cells due to the formation of nanoholes in the cellular membrane and for intraocular surgery. In addition, single cells within living tumor spheroids and 3D stem cell clusters were knocked out without destructive effects to the surrounding cells. Genomic regions of 40 nm size have been inactivated by a combination with metallic nanobeads. Sub-100nm nanprocessing with 1 -2 nJ femtosecond laser pulses at 800 nm was also performed in metal films and silicon wafers. The femtoseond laser induced nanotopography in silicon and SU-8 photoresist was used to engineer particular morphologies of stem cells. As conclusion, femtoseond laser multiphoton microscopes can be considered as novel nanoprocessing tools in nanomedicine, nanobiotechnology and material science.