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CPP: Fachverband Chemische Physik und Polymerphysik

CPP 28: POSTERS Interfaces and Thin Films

CPP 28.4: Poster

Mittwoch, 25. März 2009, 17:00–19:00, P3

High resolution, non-destructive, and quantitative material characterization on the nanoscale by HarmoniX-microscopy — •Hartmut Stadler — Veeco Instruments GmbH, Dynamostr. 19, D-68165 Mannheim (Germany)

The miniaturization of devices and functions down to the nanoscale regime require techniques for localized investigation of material properties. Particularly interesting are quantitative data on elastic, viscous or adhesive properties of thin layers or films (e.g. for their tribological or rheological behavior). Some of the already known and commercially available SPM modes (force-distance based or similar) reveal these properties to some extent, but they are limited in lateral/vertical resolution, sample compatibility, or speed of data acquisition.

Recently, HarmoniX-microscopy has been introduced as a new scanning probe mode, based on the well known and widely used standard tapping mode. HarmoniX allows nanoscale mapping of material properties such as elasticity, adhesion, and dissipation by analyzing the full spectrum of motion of special probes designed for high bandwidth measurement of tip forces. From the spectra, the force distance curves during the tapping cycles and the respective material properties of the sample can be extracted, and displayed as lateral maps in realtime. HarmoniX microscopy is hundreds of times faster than other quantitative material mapping techniques such as force volume, but retains the high resolution, non-destructive qualities of tapping mode imaging.

The fundamentals, instrumental aspects, and first applications of the new technique will be reviewed in this contribution.