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DF: Fachverband Dielektrische Festkörper

DF 12: Poster II

DF 12.10: Poster

Mittwoch, 25. März 2009, 09:30–12:30, P5

Deposition of (Ba_0.6Sr_0.4)TiO₃ on conducting PdCoO₂ — •Stefan Hirsch¹, Philipp Komissinskiy¹, Xianghui Zhou², Claudia Fasel³, and Lambert Alff¹ — ¹Dünne Schichten, Materialwissenschaft TU-Darmstadt, Darmstadt, Deutschland — ²Forschungszentrum Karlsruhe, Karlsruhe, Deuschland — ³Disperse Feststoffe, Materialwissenschaft TU-Darmstadt, Deutschland

(Ba_0.6Sr_0.4)TiO₃ is investigated intensively due to its promising properties as a tuneable dielectric material with applications e.g. in tunable filters, multi band antennas and high frequency components. High quality (Ba_0.6Sr_0.4)TiO₃ (abbreviated: BST60) thin films were grown on SrTiO₃ and NdGaO₃ substrates by pulsed laser deposition. The powder for the BST60 target was produced by two methods, sol-gel process and by solid state procedure. For the solid state method a thermo gravimetric analysis and differential thermal analysis was made to find the ideal calcination temperatures. All steps were analyzed using X-ray diffraction of the powders and the final target. In the next step a multilayer structure of PdCoO₂ as a conductive layer and BST60 on top as a dielectric one is grown by pulsed laser deposition. The powder for PdCoO₂ was also produced by a solid state procedure from PdCl₂ and CoO. The films were characterized by X-ray diffraction, high resolution scanning electron microscope, ellipsometry and four-point-measurement in the MHz and GHz range. The authors thank DFG GK 1035.