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DS: Fachverband Dünne Schichten

DS 1: Thin Film Characterisation: Structure Analyse and Composition (XRD, TEM, XPS, SIMS, RBS, ...) I

DS 1.3: Vortrag

Montag, 23. März 2009, 10:45–11:00, GER 37

Photoactive TiO₂ Thin Films: Domination of Phase Formation or Microstructure — •Darina Manova, Jürgen Gerlach, Thomas Höche, and Stephan Mändl — Leibniz-Institut für Oberflächenmodifizierung, 04318 Leipzig

For several years, TiO₂ is receiving increasing scientific attention as one of the most promising photo catalysts with a huge potential for solving several different types of environmental problems. While TiO₂ powders and nanoparticles are well known and widely used, thin film surfaces are less investigated but still highly desired for applications. For TiO₂ polymorphs, anatase powder is reported to be a more potent photo catalyst than rutile. Metal plasma immersion ion implantation and deposition is employed to form titanium oxide films on different substrates at varying ion energies and substrate heating. At low temperatures, amorphous or nanocrystalline films were observed with TEM, while a columnar structure is present at 200 - 300 ^∘C. XRD and Raman measurements indicate a transition from an anatase/rutile mixture at low temperatures and low ion energies towards pure rutile at high temperatures and high ion energies. It is shown that the photoactivity correlates closely with the phase formation and not with the microstructure of the thin films.