Dresden 2009 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 16: Poster I

DS 16.3: Poster

Dienstag, 24. März 2009, 09:30–12:30, P5

Characterization of organic thin-film transistors using metal phthalocyanines as active layers — •Iulia Genoveva Korodi, Daniel Lehmann, and Dietrich R.T. Zahn — Chemnitz University of Technology, Semiconductor Physics, D-09107 Chemnitz, Germany

In this work organic thin-film transistors (OTFTs) using Copper Phthalocyanine (CuPc), Cobalt Phthalocyanine (CoPc), and Titanyl Phthalocyanine (TiOPc) as active layers were prepared. The 20 nm thick films were deposited on highly doped Si(100) substrates with 100 nm SiO₂ by Organic Molecular Beam Deposition (OMBD) under high vacuum (HV) conditions at room temperature (RT). Source and drain electrodes of gold were deposited through a shadow mask on top by thermal evaporation under the same HV conditions, defining four OTFTs with a channel width of W=3 mm, but four different channel lengths of L=17 µm, 38 µm, 86 µm, and 187 µm. The electrical characterization of the OTFTs was performed in situ and also ex situ under ambient conditions. The influence of annealing on the mobility was probed by measuring the structure in situ at elevated temperatures up to 200^∘C. The results for the various phthalocyanine derivatives are compared and discussed.