Dresden 2009 – scientific programme
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DS: Fachverband Dünne Schichten
DS 17: Layer Properties: Electrical, Optical and Mechanical Properties I
DS 17.1: Talk
Wednesday, March 25, 2009, 09:30–09:45, GER 37
Physical and electrochemical properties of anodic oxides on combinatorial valve metal libraries. An application of the Scanning Droplet Cell — •Andrei Ionut Mardare1, Alan Savan2, Alfred Ludwig2, Andreas Dirk Wieck2, and Achim Walter Hassel1 — 1Max-Planck-Institut für Eisenforschung, Düsseldorf, Germany — 2Ruhr-Universität, Bochum, Germany
Usually, the electrochemical properties of valve metal alloys and their anodic oxidation are investigated in a small component concentration range limited by the number of available samples. A combinatorial approach has the advantage of offering a very broad compositional distribution of the alloys using a minimum number of samples. A vapor phase co-deposition technique, (co-sputtering), is successfully used for deposition of thin film binary and ternary composition spreads from various valve metals. The basic properties of the newly created alloys are mapped using SEM and XRD as a function of their composition. An automated version of a scanning droplet cell (SDC), with a tip diameter of 0.2mm, is used for local growth of anodic oxides on the surface of the combinatorial valve metal libraries. Using a step-wise increase of the oxide thickness combined with electrochemical impedance spectroscopy (EIS) allow the in-situ measurement of the oxide capacitance and electrical resistance. These lead further to the calculation of the permittivities and electrical resistivities of the anodic oxides and the computer-controlled SDC allows a mapping of these properties as a function of the parent metal concentrations.