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DS: Fachverband Dünne Schichten

DS 26: Poster II

DS 26.21: Poster

Mittwoch, 25. März 2009, 09:30–12:30, P5

A Silver Containing Liquid Alloy Ion Source — •Paul Mazarov¹, Lothar Bischoff², Wolfgang Pilz², and Andreas D. Wieck¹ — ¹Lehrstuhl für Angewandte Festkörperphysik, Ruhr-Universität Bochum, 44780 Bochum — ²Institut für Ionenstrahlphysik und Materialforschung, Forschungszentrum Dresden-Rossendorf, PF 51 01 19, 01314 Dresden

A Silver-Germanium Liquid Alloy Ion Source (LAIS) was developed and is available. Good beam performance was obtained for application in any commercial focused ion beam (FIB) system. Emission current dependent measurements were carried out of the mass spectra and energy spreads of all ion components. The ratios of doubly- and single- charged clusters to single-charged monomer ions were determined.

The AgGe-LMAIS can be very helpful for controlled formation of silver quantum wires.

[1] Thibaut Capron et.al. Phys. Rev. B77, 033102 (2008).