Dresden 2009 – scientific programme
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DS: Fachverband Dünne Schichten
DS 26: Poster II
DS 26.27: Poster
Wednesday, March 25, 2009, 09:30–12:30, P5
Condensation of silicon monoxide studied by infrared spectroscopy — •Steffen Wetzel, Markus Klevenz, Elin Granas, and Annemarie Pucci — Kirchhoff-Institut für Physik der Universität Heidelberg, INF 227, 69120 Heidelberg
Silicon oxides are materials of big interest from microelectronics to astronomy; their dielectric properties determine emission spectra of stellar objects and the use as insulators in semiconductor industry. The condensation and annealing processes of silicon monoxide (SiO) under ultra-high vacuum (UHV) conditions have been studied in situ by infrared (IR) spectroscopy. The optical properties obtained from transmission and reflectance measurements will be presented and compared to the latest literature data. Upon annealing a temperature and time dependent shift of the main vibrational frequency was observed which will be discussed in detail.