Dresden 2009 – scientific programme
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DS: Fachverband Dünne Schichten
DS 26: Poster II
DS 26.34: Poster
Wednesday, March 25, 2009, 09:30–12:30, P5
Determining the thermal conductivity of thin film single- and multilayers via the 3ω-method — •Erik Mehner1, Sebastian Winkler1, Stefan Braun2, and Dirk C. Meyer1 — 1Nachwuchsgruppe Nanostrukturphysik, Institut für Strukturphysik, Technische Universität Dresden, D-01062 Dresden, Germany — 2Fraunhofer Institut für Werkstoff- und Strahltechnik, Röntgen- EUV-Optik Dresden, Germany
Since thin thermal barrier coatings are important for applications such as microelectronics, gas turbine engines or solar-cells, nanometer-multilayer structures consisting of metals and oxides, promising extremely low thermal conductivity are of interest. A large total thermal resistance can be reached by thermal boundary resistance combined with high interface density. [1]
Thermal conductivity measurements on thin films are complex and error-prone. The 3ω-method [2], an ac-technique, shifting the measurement into the frequency domain, provides a useful method for measuring the thermal conductivity.
The nanolaminates were made of W, Al, Zr and their oxides and deposited on different substrates employing ion beam sputtering.
[1] R. M. Costescu, David G. Cahill, F. H. Fabreguette, Z. A. Sechrist, and S. M. George. Science, 303(5660), 989-990, (2004)
[2] David G. Cahill. Rev. Sci. Instrum., 61(2), 802-808, (1989)