Dresden 2009 – scientific programme
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DS: Fachverband Dünne Schichten
DS 31: Application of Thin Films II
DS 31.4: Talk
Thursday, March 26, 2009, 17:00–17:15, GER 37
Influence of nitrogen flow on structure and magnetic properties of magnetron-sputtered FeCo/TiN multilayer films — •Christian Klever and Klaus Seemann — Forschungszentrum Karlsruhe, Institute of Materials Research I, D-76344 Eggenstein-Leopoldshafen, Germany
Soft magnetic thin films with appropriate high frequency properties are interesting for applications, e. g., as core material for microinductors and for magnetoelastic sensors/actuators. For the use in such devices, tailoring of the magnetic film properties (e. g. saturation magnetization MS, coercitive field HC, anisotropy field HK) is necessary.
In this study, multilayer films consisting of FeCo as the magnetic constituent and TiN as diffusion barrier are developed. The films are grown by sequential magnetron sputter deposition using a FeCo and a TiN target in an Ar atmosphere with an additional N2 flow between 0 and 5 % of the total gas flow. The films are annealed ex-situ in a static magnetic field. The static and dynamic macroscopic magnetic properties of the films are determined by means of a vibrating sample magnetometer and a strip-line permeameter connected to a vector network analyzer, respectively. The microstructure and constitution of the films are examined by XRD, XRR, TEM and AES depth profiling.
It is shown that films with a coercitive field below 0.2 mT and a sufficient high frequency response can be produced by defining appropriate growth and film annealing conditions. Furthermore, the correlation between the nanoscale coating architecture, the films’ microstructure and its macroscopic magnetic properties is presented.