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HL: Fachverband Halbleiterphysik

HL 48: Poster 2

HL 48.80: Poster

Donnerstag, 26. März 2009, 15:00–17:30, P2

Microscopic investigations of the damp-heat degradation of Al-doped ZnO on structured surfaces — •Uli F. Wischnath¹, Thomas Madena¹, and Dieter Greiner² — ¹Univ. Oldenburg, Inst. f. Physik, C. v. Ossietzky Str., 26129 Oldenburg — ²Helmh. Zent. Berlin, Glienicker Str. 100, 14109 Berlin

The conductivities of unencapsulated Al-doped ZnO (ZAO) thinfilm layers on structured surfaces show a strong degradation under damp-heat stress. From earlier investigations [1] it was deduced that extendend grain boundaries are the prevalent source of this phenomenon. The extended grain boundaries are regions where the growth of the ZAO is perturbated due to the underlying microstructure. They have been realized for the current investigations as parallel rectangular ridges. We show here AFM-based investigations of the local potential on the structured ZAO samples. These measurements allow insight into the microscopic processes causing the macroscopic detectable degradation.

[1] Greiner et al., Thin Solid Films, article in press, (2008)