Dresden 2009 – scientific programme
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MA: Fachverband Magnetismus
MA 23: Magnetic Thin Films II
MA 23.8: Talk
Wednesday, March 25, 2009, 16:30–16:45, HSZ 04
Synthesis and characterization of Permalloy thin films prepared by DC-magnetron sputtering — •Saleh Getlawi1, Frank Müller1, Michael Wick1, Michael R. Koblischka1, Stefan Hüfner1, Jörg Schmauch2, Vassil Skumryev3, and Uwe Hartmann1 — 1Experimental Physics, Saarland University, Campus C 6 3, D-66123 Saarbrücken, Germany — 2Technical Physics, Saarland University, Campus D2 2, D-66123 Saarbrücken, Germany — 3Departament de Física, Universitat Autònoma de Barcelona, 08193 Bellaterra, Barcelona, Spain
Recently, the interest in permalloy (Ni81Fe19; Py) thin films has again increased. This is mainly due to their utilization in integrated thin layers, magnetic heads and in small-size magnetic sensor and memory applications. Several fabrication methods such as vacuum evaporation, electroplating, and most recently, sputtering have been employed for the preparation of Py thin films. Here, we report on the preparation of Py thin films by means of DC sputtering, and perform a thorough analysis of the resulting thin film samples. XPS depth profiling experiments were performed in detail, resulting in a Ni:Fe ratio close to the nominal value. The Py films exhibit nearly no oxygen inclusion, and C impurities are in the range of about 5% throughout the film.The grain size of the films was examined by TEM. The magnetic characterization of the Py films was performed by means of SQUID and magnetoresistive measurements including Hall effect analysis. The magnetic domain structures on lithography patterned samples were investigated in detail by magnetic force microscopy.