Dresden 2009 – scientific programme

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TT: Fachverband Tiefe Temperaturen

TT 5: Postersession Superconductivity: Materials - Fabrication and Properties

TT 5.18: Poster

Monday, March 23, 2009, 13:00–16:45, P1A

Masked ion beam patterning of nano-size regions of high-T_c superconducting thin films — •Marius Bodea¹, Khurram Siraj¹, Johannes Pedarnig¹, Dieter Bäuerle¹, Wolfgang Lang², Herbert Richter², Markus Marksteiner², Christine Hasenfuss¹, Leopold Palmetshofer¹, Renata Kolarova¹, Peter Bauer¹, and Costas Grigoropoulos³ — ¹Technical and Natural Science Faculty, Johannes Kepler University, A-4040 Linz, Austria — ²Faculty of Physics, University of Vienna, A-1090 Vienna, Austria — ³Department of Mechanical Engineering, University of California, Berkeley, CA 94720-1740, USA

Ion-beam irradiation of the high-temperature superconductor (HTS) YBa₂Cu₃O₇ (Y-123) creates different types of defects depending on ion mass, energy and dose. Irradiation with Helium ions of moderate energy (75 keV) primarily creates point defects by displacement of oxygen atoms in Y-123. The He ions penetrate thin films of Y-123 (thickness 100 nm) producing defects that are distributed homogeneously in the HTS layer. The collision cascades show small lateral straggle. This allows for patterning of nanostructures by directing a low divergence ion beam onto a HTS thin film sample through a mask. The modification of electrical transport properties of Y-123 thin films by He ion irradiation, the variation of thin film resistivity and critical temperature with ion dose and the patterning of features about 200 nm in size by masked ion beam irradiation are presented. Computer simulations indicate that nano-patterning of Y-123 thin films with 10 nm lateral resolution is achievable.