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P: Fachverband Plasmaphysik
P 4: Staubige Plasmen
P 4.7: Vortrag
Montag, 30. März 2009, 18:10–18:25, HS Biochemie (groß)
Micro-particles as thermal probes in a low pressure plasma — •Horst Maurer1, Ralf Basner1, and Holger Kersten2 — 1INP Greifswald, Felix-Hausdorff-Str. 2, D-17489 Greifswald — 2IEAP University of Kiel, D-24098 Kiel
The energetic and thermal conditions at surfaces exposed to a low pressure plasma determine their microstructure, morphology and stoichiometry and, hence, are of essential concern in surface modification. As the equilibrium temperature of objects immersed in a plasma is determined by the sum of different energy fluxes between the surface and the surrounding plasma, these fluxes can be influenced by the variation of plasma parameters and gas composition. The energetic contributions can therefore be experimentally accessed by the utilization of temperature measurements.
Unfortunately, for micro-particles levitating in the sheath of a plasma, no proper temperature diagnostic is available yet. Thus, a new non-contact diagnostic for temperature measurements on micro-scaled objects has been developed and used for the improvement of technical plasmas and the understanding of particle-plasma interactions.
In this work, a technique for non-invasive in-situ temperature measurements using luminescent phosphor particles is presented. Under uv illumination, the utilized particles show temperature dependent features in their emission spectrum. First experimental results of parametric studies on particle-temperatures will be discussed with respect to the plasma parameters determined by Langmuir probe diagnostics.