Greifswald 2009 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 9: Poster: Niedertemperaturplasmen

P 9.16: Poster

Dienstag, 31. März 2009, 17:30–19:30, Foyer des IfP

On the deposition ability of atomic species on a Pyrex surface studied via NO destruction kinetics — •Marko Hübner¹, Olivier Guaitella², Antoine Rousseau², and Jürgen Röpcke¹ — ¹INP-Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany — ²LPTP, Ecole Polytechnique, CNRS, 91128 Palaiseau, France

To investigate the deposition ability of atomic species on surfaces and to understand the influence of coated surfaces to the destruction kinetics of NO during a plasma pulse a Pyrex tube has been used as a cylindrical plasma reactor. The inner surface of the tube was treated by a capacitive coupled RF plasma with different pre-cursors, namely O₂, N₂, Ar, and synthetic air. Thereafter, a gas mixture of 1% NO in N₂ was filled into the tube and used as a probe. The concentration of NO and NO₂ in the Pyrex tube was measured using IR-spectroscopy supplied by two quantum cascade laser based Q-MACS systems. With these preparations, two kinds of experiments have been performed. On one hand, the concentration of NO and NO₂ have been measured without plasma. It could be shown, that after O₂ and air pre-treatment, the concentration of NO decreased whereas the NO₂ concentration increased. The time scale is in the range of several tens of minutes. On the other hand, the respective concentration was measured during a 500ms RF plasma pulse.