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SYOT: Anwendungen der Plasmatechnik in den Optischen Technologien

SYOT 1: Optische Beschichtungen

SYOT 1.3: Hauptvortrag

Dienstag, 31. März 2009, 15:00–15:30, HS Physik

Study of reaction kinetics, process control and trace gas detection in molecular gases and plasmas based on QCLAS — •Jürgen Röpcke — neoplas control GmbH, Walther-Rathenau-Straße 49a, 17489 Greifswald, Germany

Mid infrared absorption spectroscopy (AS) between 3 and 20 micro m based on quantum cascade lasers (QCL) has progressed considerably as a powerful diagnostic technique for in situ studies of the fundamental physics and chemistry of molecular plasmas and for trace gas analysis. Since plasmas with molecular feed gases are used in many industrial applications such as thin film deposition and semiconductor processing this has stimulated the adaptation of QCLAS to industrial requirements. The Q-MACS technology provides compact and user friendly quantum cascade laser measurement and control systems developed to monitor and control plasma processes and to detect trace gases with high sensitivity (sub-ppb). The contribution introduces in the principles of the Q-MACS technology and highlights new products of the Q-MACS family. Several examples of applications in research and industry, given in the contribution, underline the outstanding solutions for on-line process control and highly sensitive measurements in gases and plasmas.