Hannover 2010 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 1: Plasmatechnology

P 1.4: Vortrag

Montag, 8. März 2010, 14:55–15:10, B 302

Construction and Characterization of Micro Plasma Jet for Thin Film Deposition on Capillary. — •Ramasamy Pothiraja, Nikita Bibinov, Philipp Mertmann, and Peter Awakowicz — Institute for Electrical Engineering and Plasma Technology, Ruhr-Universität Bochum, Germany.

A micro plasma jet operating with variable applied voltage, frequency, reacting gas has been developed. An axial directed long filamentary discharge ignited in this micro plasma jet in inert gas and nitrogen will be used for film deposition in tube and capillaries. Methane and acetylene will be used as precursor gas for production of chemically active radicals. For the optimization of deposition condition, discharge is characterized using optical emission spectroscopy (OES) with time and spatial resolution. Electron distribution function and electron density are determined using OES and numerical simulations. The influence of nature of plasma forming gas, applied voltage and gas flow rate on plasma parameters like filament geometry, reduced electric field, electron density and its energy distribution, rate constant for the different reactions have also been studied. These results will be presented and compared with the plasma parameters obtained for similar plasma generating instrument *Plasma brush(Regd.)*.