Hannover 2010 – wissenschaftliches Programm
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Q: Fachverband Quantenoptik und Photonik
Q 67: Photonics IV
Q 67.4: Vortrag
Freitag, 12. März 2010, 14:45–15:00, F 128
Fabry-Perot microcavities in ultra-small SOI waveguides — •Bülent A. Franke1, Aws Al-Saadi1, Shaimaa Mahdi1, Sigurd Schrader2, Viachaslau Ksianzou2, Harald Richter2, Stefan Meister1, and Hans J. Eichler1 — 1Technische Universität Berlin, Institut für Optik und Atomare Physik, Berlin, Germany — 2Technische Fachhochschule Wildau, Institut für Plasma- und Lasertechnik, Wildau, Germany
Microcavity filters in ultra-small Silicon on Insulator (SOI) waveguides are investigated. The microcavities are formed by one-dimensional photonic crystals (PhC) in Fabry-Perot structures, which are embedded in planar strip waveguides with 500nm width and 220nm height.
The photonic crystal microcavities are fabricated in a CMOS environment using 248nm DUV lithography. Several types of PhC micorcavities were optically characterized by a measurement setup using an external cavity laser (ECL) (tunable from 1520nm to 1630nm) and a nano-positioning system with an active differential intensity alignment system for the coupling of light.
Results of a number of different cavity filters, for instances multi-cavity, first and higher order cavities will be presented. Furthermore the measured transmission characteristics will be compared with simulations.