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DS: Fachverband Dünne Schichten

DS 19: Synthesis of Nanostructured Films by Self-organization I (Focused Session)

DS 19.1: Topical Talk

Mittwoch, 24. März 2010, 10:30–11:00, H2

Glancing angle deposition: Preparation, properties, and application of micro- and nanostructured thin films — •Bernd Rauschenbach, Christian Patzig, Jens Bauer, and Chinmay Khare — Leibniz Institute of Surface Modification, 04318 Leipzig, Permoserstr. 15

Physical vapor deposition under conditions of obliquely incident flux and limited adatom diffusion results in films with a columnar microstructure. An additional substrate rotation can be used to sculpt the columns into various morphologies. This is the basis for glancing angle deposition (GLAD), which generate sculptured thin films with properties that can be designed and realized in a controllable manner. This overview examines the GLAD process and column growth, the properties observed in GLAD produced films, and the applications of this technology. The initial stages of the thin film growth focusing on concepts important to the GLAD process and the effects of ballistic shadowing and surface diffusion, as well as explaining how column morphology evolves during growth are discussed. Deposition onto prepatterned topographies and methods for controlling the column shape, predicting and modelling the column growth are examined. Because this deposition process provides precise nanoscale control over the structure, characteristics such as the mechanical, magnetic and optical properties of the sculptured films may be engineered for various applications. Depositing onto prepatterned substrates forces the columns to adopt a planar ordering, an important requirement for different applications.