Regensburg 2010 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 19: Synthesis of Nanostructured Films by Self-organization I (Focused Session)

DS 19.2: Vortrag

Mittwoch, 24. März 2010, 11:00–11:15, H2

Agglomeration kinetics and pattern formation of Pt thin films on yttria stabilized zirconia single crystals — •Henning Galinski, Thomas Ryll, Lukas Schlagenhauf, Anja Bieberle-Hütter, Jennifer M. Rupp, and Ludwig Gauckler — Nonmetallic Inorganic Materials, ETH Zurich, Zurich, Switzerland

Metals and ceramics have distinct diametric bonding characteristics. Thus, the stability of a metal thin film on a ceramic substrate is conditioned by the interactions between the different bonding types across the interface. In the case of weak adhesion the minimization of free surface energies gives rise to decomposition and agglomeration of thin films. Pt thin films with thicknesses up to 180nm were deposited via magnetron and ion-beam sputtering on yttria stabilized zirconia single crystals and subjected to heat treatments up to 1173K for 2 hours. In the case of ion beam sputtering the single crystal has been pre-cleaned in the ion-beam before deposition. The morphological evolution of Pt thin films has been investigated by means of scanning electron microscopy (SEM) and atomic force microscopy (AFM). Three main observations have been made: i) the pre-cleaning has an impact on the morphological evolution of the film during annealing, hence impurities on the surface can be regarded as additional sources for agglomeration. ii) The morphological evolution as function of time has been analyzed by means of Minkowski measures. For the stage of hole coalescences a deviation from the expected Gaussian behaviour is found. iii) The hole growth is in agreement with Brandon and Bradshaw's theory of surface energy driven diffusion.