Regensburg 2010 – scientific programme

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DS: Fachverband Dünne Schichten

DS 37: Thin Film Characterisation: Structure Analyse and Composition (XRD, TEM, XPS, SIMS, RBS, ...) II

DS 37.3: Talk

Thursday, March 25, 2010, 11:45–12:00, H8

Advanced species depth-profiling with a photon-in photon-out method — •Beatrix Pollakowski and Burkhard Beckhoff — Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, 10587 Berlin

Characterizing multi-layered systems with layer thicknesses of up to 10 nm, which is beyond conventional electron information depths and sensitivity, only spectroscopic method based on photon excitation and detection may provide information without any destructive modifications of the specimens. The presented photon-in photon-out method GIXRF-NEXAFS [1] allows for a non-destructive analysis with respect to the chemical bonds of deeply buried single layers. Considering the investigation of buried interfaces or gradient layers this approach may gain in importance as alternative method. The intensity of the X-ray standing wave (XSW) field determining GIXRF characteristics is utilized as a tunable marker to keep the mean penetration depth constant in the respective layer of interest.

The multi-layered systems investigated consist of a titanium oxide and metallic titanium layer, separated from each other by a 2 nm C layer. For the respective experiment, well-characterized monochromatic synchrotron radiation of the electron storage ring BESSY II and absolutely calibrated instrumentation was employed. GIXRF-NEXAFS measurements at the Ti-L_iii,ii absorption edges with angular correction based upon prior XSW simulation demonstrate the high potential of the approach for analyzing novel materials and may provide access to buried interfaces by a differential approach.

[1] B. Pollakowski et al., Phys. Rev. B 77, 235408 (2008)