Regensburg 2010 – scientific programme

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DS: Fachverband Dünne Schichten

DS 5: Nanoengineered Thin Films

DS 5.4: Talk

Monday, March 22, 2010, 16:30–16:45, H8

Thin films of CoFe₂O₄, ZnO, and BaTiO₃ patterned by micromoulding — •Ole F. Göbel, Tomasz Stawski, Sjoerd Veldhuis, Dave H.A. Blank, and Johan E. ten Elshof — Inorganic Materials Science, MESA+ Institute for Nanotechnology, University of Twente, the Netherlands

Thin films of functional oxides such as CoFe₂O₄, ZnO, or BaTiO₃ were derived from polymeric or sol-gel precursor solutions. Patterning the still liquid precursor films by simple micromoulding, followed by drying and pyrolysis, eventually yielded patterned oxide films, patterns having feature sizes of a few micrometer. The features, such as lines or dots, were completely isolated from each other. This low-cost technique requires very simple equipment and is applicable to a number of oxide material.