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DS: Fachverband Dünne Schichten

DS 9: Poster: Synthesis of Nanostructured Films by Self-organization, Thermoelectric Thin Films and Nanostructures, High-k and Low-k Dielectrics, Layer Deposition Processes, Layer Growth, Layer Properties, Application of Thin Films, Surface Modification, Hard and Superhard Coatings, Metal Layers

DS 9.20: Poster

Montag, 22. März 2010, 15:00–17:30, Poster D1

The influence of Sb clusters on electrical characteristics in organic-semiconductor structures — •Markus Arnold¹, Yue Huang², Axel Fechner¹, and Dietrich R. T. Zahn¹ — ¹Chemnitz University of Technology, Semiconductor Physics, 09107 Chemnitz, Germany — ²Fudan University, Department of Microelectronics, Shanghai 200433, China

Electrical characterization using capacitance-voltage (CV) and charge transient spectroscopy (QTS) of Al/copper phthalocyanine (CuPc)/Si structures are presented. The CuPc layer was modified by the incorporation of Sb clusters. In this case the CV-measurements reveal some hysteresis in contrast to structures without Sb. This is assigned to a charge trapping in the Sb clusters. In order to analyze this in detail QTS is applied.

QTS originally developed by Kirov et al. [1] is an electrical measurement technique related to deep-level transient spectroscopy (DLTS) developed by Lang et al. [2]. Using QTS it is possible to measure charge reloading processes even in the absence of a depletion region as a function of time and temperature with different pulse voltages and widths. As a result, one can determine the energetic position, the capture cross section, and the density of the electrically active traps.

K. I. Kirov, K.B. Radev, Phys. Stat. Sol. (a) 63 (1981) 711

[2] D. V. Lang, J. Appl. Phys. 45 (1974) 3023