Regensburg 2010 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 9: Poster: Synthesis of Nanostructured Films by Self-organization, Thermoelectric Thin Films and Nanostructures, High-k and Low-k Dielectrics, Layer Deposition Processes, Layer Growth, Layer Properties, Application of Thin Films, Surface Modification, Hard and Superhard Coatings, Metal Layers

DS 9.28: Poster

Montag, 22. März 2010, 15:00–17:30, Poster D1

Sb doped SnO2: attractive alternative TCO material for ITO — •Janika Boltz, Dominik Koehl, and Matthias Wuttig — I. Physikalisches Institut (IA) RWTH Aachen 52056 Aachen Germany

Transparent Conducting Oxides (TCO) are widely employed in applications such as displays, solar cells or architectural glazing. Most commonly used materials today are based on Indium Tin Oxide (ITO). Limited amounts of explorable Indium will soon lead to a shortage of ITO, thus alternatives based on other materials are needed. Sb-doped SnO2 films possess a high optical transparency and good electrical conduction, which makes them attractive for TCO applications. In order to deposit suitable films on large area substrates we have explored the properties of Sb-doped SnO2 thin films that have been prepared by reactive dc magnetron sputtering from a metallic target at room temperature. The films were subsequently analysed regarding their optical, electrical and structural properties. Our results show that there is only a narrow process window for the sputter deposition of transparent and conducting tin oxide films at room temperature. A sharp minimum in resistivity is observed at an oxygen content of approximately 17 % in the sputtering gas. Under these deposition conditions, the SnO2:Sb films turn out to be highly transparent and crystalline.