Regensburg 2010 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 9: Poster: Synthesis of Nanostructured Films by Self-organization, Thermoelectric Thin Films and Nanostructures, High-k and Low-k Dielectrics, Layer Deposition Processes, Layer Growth, Layer Properties, Application of Thin Films, Surface Modification, Hard and Superhard Coatings, Metal Layers
DS 9.32: Poster
Montag, 22. März 2010, 15:00–17:30, Poster D1
Vibrational Modes of thin Silicon Membranes — •Reimar Waitz1, Olivier Schecker1,2, and Elke Scheer1 — 1Universität Konstanz, Germany — 2jetzt Robert Bosch GmBH
Membranes with thicknesses of a few hundred nanometers and macroscopic lateral size are interesting systems to study the mechanical properties of solids on various length scales. In our experiment a piezo is used to couple in vibrations, which can be observed with a white light interferometer using stroboscopic light. This way we image transverse modes of frequencies up to 12 MHz. The influence of strain on the the dispersion relation is investigated by applying a pressure difference between both sides of the membrane.