Regensburg 2010 – scientific programme
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DS: Fachverband Dünne Schichten
DS 9: Poster: Synthesis of Nanostructured Films by Self-organization, Thermoelectric Thin Films and Nanostructures, High-k and Low-k Dielectrics, Layer Deposition Processes, Layer Growth, Layer Properties, Application of Thin Films, Surface Modification, Hard and Superhard Coatings, Metal Layers
DS 9.34: Poster
Monday, March 22, 2010, 15:00–17:30, Poster D1
Properties of YSZ thin films prepared by RF sputter deposition using a ceramic target — •Benjamin Pachner1, Angelika Polity1, Sven Ole Steinmüller2, and Jürgen Janek2 — 1I. Physikalisches Institut, Justus-Liebig-Universität Giessen, Heinrich-Buff-Ring 16, 35392 Giessen, Germany — 2Physikalisch-Chemisches Institut, Justus-Liebig-Universität Giessen, Heinrich-Buff-Ring 58, 35392 Giessen, Germany
Yttria-stabilized zirconia (YSZ) as an oxygen ion conductor is widely used in technical applications like solid oxide fuel cells for example. The question of film stability and structure is important for increasing the efficiency of these films. In this work YSZ thin films have been prepared by radio frequency (RF) sputter deposition on float glass substrates using a ceramic YSZ target doped with 9.5 mol% yttria and argon as sputtering gas. Several process parameters such as substrate temperature, RF power level, process gas flow rate and the amount of additional oxygen as reactive gas have been varied. The influence of these variations on the structure of the YSZ thin films has been investigated using (among others) scanning electron microscopy (SEM), X-ray diffraction, and optical absorption spectroscopy.