Regensburg 2010 – scientific programme

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DS: Fachverband Dünne Schichten

DS 9: Poster: Synthesis of Nanostructured Films by Self-organization, Thermoelectric Thin Films and Nanostructures, High-k and Low-k Dielectrics, Layer Deposition Processes, Layer Growth, Layer Properties, Application of Thin Films, Surface Modification, Hard and Superhard Coatings, Metal Layers

DS 9.41: Poster

Monday, March 22, 2010, 15:00–17:30, Poster D1

Synthesis and characterization of ion-conducting lithium phosphorus oxynitride thin Films — •Eric Hofmann, Thomas Leichtweiss, Angelika Polity, and Bruno K. Meyer — Justus- Liebig- Universitaet Giessen, I. Physikalisches Institut, Heinrich-Buff-Ring 16, 35392 Giessen, Germany

Transparent amorphous lithium phosphorus oxynitride (LiPON) thin films can be used in smart windows as solid Li+-ion-conductors. Our films were deposited by RF-sputtering from a ceramic Li3PO4 target in pure N2-atmosphere on glass substrates, the film thickness is typically 100 nm. Our aim is to optimize the deposition parameters in view of the ion-conductivity.

The deposition parameters such as the deposition rates, the film stoichiometry and the morphology were studied by X-ray reflection, photo electron spectroscopy and AFM-microscopy. The dependence of the ion-conductivity on the deposition parameters was measured by impedance spectroscopy using InCu|LiPON|InCu sandwich structures.