Regensburg 2010 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 9: Poster: Synthesis of Nanostructured Films by Self-organization, Thermoelectric Thin Films and Nanostructures, High-k and Low-k Dielectrics, Layer Deposition Processes, Layer Growth, Layer Properties, Application of Thin Films, Surface Modification, Hard and Superhard Coatings, Metal Layers
DS 9.45: Poster
Montag, 22. März 2010, 15:00–17:30, Poster D1
Preparation of a heater and sensor arrangement on Si3N4 thin membranes for in-plane thermal conductivity measurements — •David Hartung, Torsten Henning, and Peter J. Klar — I. Physikalisches Institut, Justus-Liebig-Universität Gießen, Germany
The aim of this work is to characterize the lateral heat flow in a thin material layer on a Si3N4 membrane. Thin Si3N4 membranes (200 nm thickness, 500 µm × 500 µm) on Si-substrates (200 µm thickness, 2.5 mm × 2.5 mm) fabricated by Plano GmbH are used as substrates for the heater and sensor arrangement. A meandering Ag wire along the middle axis of the membrane serves as an electric heater, three Ag-wires of 5 µm thickness at different distances from, but parallel to the heater wire, serve as temperature sensors. The arrangement was defined by electron-beam-lithography on to the membrane. After a development step thin layers of chrome, working as a primer and then silver as the actual wire material were evaporated on to the structured PMMA. A following lift off step completes the nanofabrication of the wire arrangement on the membrane. (spp 1386)