Regensburg 2010 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 27: GaN Preparation and Characterization

HL 27.3: Vortrag

Dienstag, 23. März 2010, 14:30–14:45, H15

Processing and contacting of free standing nanorod arrays — •Richard Neumann, Ünsal Sökmen, Stephan Merzsch, Sönke Fündling, Shunfeng Li, Gerhard Palm, Hergo-Heinrich Wehmann und Andreas Waag — Institut für Halbleitertechnik, Technische Universität Braunschweig, 38092 Braunschweig

Nanorods are a hot topic in today’s research. Large surfaces are excellent preconditions for gas sensors. The decreased thermal conductivity with good electric conductivity gives a chance for high efficiency thermoelectric devices. Furthermore nanorods show less dislocations then bulk material, giving rise to applications like high quality LEDs with an enhanced light out-coupling due to a smoother refractive index transition or due to photonic crystal effects in which they could be arranged in.

All these possibilities have one thing in common - they need electrical contacts on free standing nanorods, and therefore, suitable processing techniques. The three dimensionality of the structure generates problems that can’t be overcome with conventional two dimensional processing used in semiconductor techniques. The first approach we are presenting is planarization giving the possibility to use conventional techniques afterwards. We show different materials with the possibility to level structures with a height of up to 6 µm.

As a second approach we show a new way to contact every single nanorod simultaneously without the need of planarization and lithography. This approach gives the possibility to contact single nanorods without encapsulating the surface.