Regensburg 2010 – scientific programme

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HL: Fachverband Halbleiterphysik

HL 47: New Materials: mainly thermoelectric and nanomechanical Properties

HL 47.4: Talk

Wednesday, March 24, 2010, 16:45–17:00, H14

Modeling Nanomechanical Quality Factors — •Quirin Unterreithmeier, Thomas Faust, and Jörg Kotthaus — Fakultät für Physik and Center for NanoScience (Cens), Ludwig-Maximillians-Universität, Geschwister-Scholl-Platz 1, 80539 München, Germany

The study of nanomechanical resonant motion is a rapidly advancing field of science with prospects in fundamental science and application. For many aspects, a low mechanical friction (or equally high quality factor) is advantageous. However, the dominant damping mechanism is yet to be known. We present studies on silicon nitride resonators under high tensile stress having high mechanical quality factors. Applying a damping model based on continuum mechanics that assumes a homogeneous friction throughout volume of the resonator, we are able to quantitatively model the quality factors observed in the (room-temperature) experiments.