Regensburg 2010 – scientific programme
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HL: Fachverband Halbleiterphysik
HL 61: Poster II: Materials, Interfaces and Heterostructures
HL 61.29: Poster
Thursday, March 25, 2010, 18:00–20:00, Poster D1
Fabrication of ZnO cavities for planar microresonators — •Helena Hilmer1, Chris Sturm1, Rüdiger Schmidt-Grund1, Jesús Zúñiga-Pérez2, Holger Hochmuth1, Marina Cornejo3, Frank Frost3, and Marius Grundmann1 — 1Universität Leipzig, Institut für Experimentelle Physik II, Linnéstr. 5, 04103 Leipzig, Germany — 2CRHEA, Rue Bernard Grégory, 06560 Valbonne, France — 3IOM e.V., Permoserstr. 15, 04318 Leipzig, Germany
We report on the growth of planar microresonators by pulsed laser deposition (PLD), which consist of two all-oxide Bragg reflectors (BR), made of yttria stabilized zirconia and alumina, surrounding a ZnO cavity as active medium. Detailed photoluminescence (PL) and reflectivity analyses have shown, that the resonators are in the strong coupling regime up to 410 K [1], but Bose-Einstein-Condensation is still a challenge. As the BR materials do not grow epitaxially on the substrates, the main task lies in the optimisation of the ZnO cavity layer, i.e low surface roughness and intensive, narrow luminescence.
Therefore suitable PLD growth conditions were combined with an annealing step as well as two additional strategies: First, conventional ZnO half-resonators, i.e. the lower BR with the ZnO cavity, have been ion beam polished to smooth the rough ZnO layer. Second, the cavity was grown by molecular beam epitaxy (MBE) on top of PLD-grown BR. Compared to PLD samples, PL measurements do not indicate any degradation due to ion beam smoothing of the PLD samples and show narrower ZnO luminescence for the (rougher) MBE samples.
[1] C. Sturm et al., NJP 11, 073044 (2009).