Regensburg 2010 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 23: Nanostructures at surfaces: Dots, particles, clusters

O 23.9: Vortrag

Dienstag, 23. März 2010, 12:30–12:45, H33

Mechanism of metal nanostructure self-ordering during oblique deposition on pre-patterned surfaces — •Satoshi Numazawa and Karl-Heinz Heinig — Forschungszentrum Dresden-Rossendorf, Dresden, Germany

During oblique metal vapor deposition perpendicular to ripples of pre-patterned surfaces, a chain-like formation of metal nanoclusters along the ripples has been observed. The metal nanoclusters are located on the slopes which point towards the evaporation source. The self-ordering of metal nanoclusters has not been observed for normal deposition and for low-angle deposition parallel to the ripple direction. The features of the metal nanostructure depend strongly on the evaporation angle. Here, by means of 3D lattice kinetic Monte Carlo simulations, we studied the process of silver deposition on pre-patterned, oxidized Si surfaces. The experimentally observed Ag nanostructures could be reproduced. It was shown that the extremely low sticking probability of deposited Ag together with a slope-dependent deposition rate leads to a strongly selective Ag nanocluster nucleation on the surface because the nucleation rate depends on the square of the adatom concentration.