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Regensburg 2010 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 33: Nanostructures at surfaces: arrays

O 33.3: Vortrag

Dienstag, 23. März 2010, 15:30–15:45, H31

ArF excimer laser irradiation of metallic nanoparticles on SiliconMartin Kunz, •Alfred Plettl, and Paul Ziemann — Institut für Festkörperphysik, Universität Ulm, D-89069 Ulm

Distinct methods like a micellar technique [1], miniemulsion / emulsion techniques [2,3] or extended Polysterene (PS) colloid lithography [4] were developed for the preparation of self-assembled arrays of metal (Au, Pt) or polymer (PS, PMMA) nanoparticles (NPs). A short introduction into the various preparation routes, with emphasis on the progress of the micellar technique, will be given.

Studies on the effect of ArF-laser irradiation of extended metal NP arrays with diameters of about 10 or 30 nm respectively, deposited on Si- and SiO2-substrates, are reviewed. The optical and thermal properties of different sample arrangements are analysed, the experimental set-up is presented and some observations at different laser energy densities are reported and discussed. Various phenomena can clearly be identified: small NPs show particle melting and shape rounding at low fluences or complete removal. Under special conditions also sinking of Pt-NPs into Si-oxide was observed. Large Au-particles behave different, e.g. are resulting in fragmentation. If fluences locally higher than the ablation threshold of the Si are reached on the substrate, additional phenomena become visible.

[1] G.Kästle, et al., Adv. Funct. Mat. 13, 853 (2003).

[2] A. Manzke, et al., Adv. Mater. 19, 1337 (2007).

[3] E.Schreiber, et al., Chem. Mater. 21, 1750 (2009).

[4] A. Plettl, et al., Adv. Funct. Mat. 19, 3279 (2009).

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