Regensburg 2010 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 59: Poster Session II (Nanostructures at surfaces: Dots, particles, clusters; Nanostructures at surfaces: arrays; Nanostructures at surfaces: Wires, tubes; Nanostructures at surfaces: Other; Plasmonics and nanooptics; Metal substrates: Epitaxy and growth; Metal substrates: Solid-liquid interfaces; Metal substrates: Adsoprtion of organic / bio molecules; Metal substrates: Adsoprtion of inorganic molecules; Metal substrates: Adsoprtion of O and/or H; Metal substrates: Clean surfaces; Density functional theory and beyond for real materials)

O 59.23: Poster

Mittwoch, 24. März 2010, 17:45–20:30, Poster B1

Focused electron beam induced processing in UHV: "nanowriting" with an electron-beam as a pen and precursor molecules as ink — Florian Vollnhals, Marie-Madeleine Walz, Michael Schirmer, Thomas Lukasczyk, Hans-Peter Steinrück, and •Hubertus Marbach — Lehrstuhl für Physikalische Chemie II and Interdisciplinary Center for Molecular Materials (ICMM), Friedrich-Alexander-University Erlangen-Nuremberg, Egerlandstr. 3, 91058 Erlangen

In this contribution we aim towards the generation of arbitrarily shaped naonostructures with well defined chemical composition by focused electron beam induced processing (FEBIP) of either adsorbed precursor molecules or the substrate itself. The electron beam irradiation of adsorbed precursor molecules results in the local decomposition and thus the deposition of non-volatile fragments (electron beam induced deposition, EBID). In our distinct "surface science approach" to EBID we could show that working in an ultra clean environment, i.e. in ultra high vacuum (UHV), is advantageous in terms of cleanliness and partially size of the generated deposits. Recently we could also explore the localized activation of an oxide surface by an focused electron beam, such that Fe(CO)₅ dosed after the exposure is decomposed at the irradiated area, resulting in clean iron deposits. Results and principles of the described techniques will be presented and discussed as an engineering tool to generate or modify nanosized objects. This work was supported by the Deutsche Forschungsgemeinschaft under grant MA 4246/1-1.