Regensburg 2010 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 59: Poster Session II (Nanostructures at surfaces: Dots, particles, clusters; Nanostructures at surfaces: arrays; Nanostructures at surfaces: Wires, tubes; Nanostructures at surfaces: Other; Plasmonics and nanooptics; Metal substrates: Epitaxy and growth; Metal substrates: Solid-liquid interfaces; Metal substrates: Adsoprtion of organic / bio molecules; Metal substrates: Adsoprtion of inorganic molecules; Metal substrates: Adsoprtion of O and/or H; Metal substrates: Clean surfaces; Density functional theory and beyond for real materials)
O 59.74: Poster
Mittwoch, 24. März 2010, 17:45–20:30, Poster B1
Hydrocarbon contamination of different ruthenium surface orientations — •Thanh-Nam Nguyen1, Sina Gusenleitner1, Marius Ernst1, Holger Wetzstein1, Dirk Ehm2, and Friedrich Reinert1 — 1University of Würzburg, Experimental Physics VII, Am Hubland, 97074 Würzburg — 2Carl Zeiss SMT AG, Rudolf-Eber-Str. 2, 73447 Oberkochen
Multilayer mirrors for Extreme Ultraviolet (EUV) Lithography applications are threatened by various damaging processes. During exposure, the dominating contamination processes are carbonization and oxidation due to adsorption of hydrocarbons and oxygen and their reaction with the mirror surface, reducing the mirror lifetime. One possibility to limit these lifetime risks is to coat the mirror with a dedicated capping material, such as Si, Ti, Mo, Pd, Ru, or their oxides. To study the general interaction mechanisms of adsorbates with the capping materials, organic model molecules are used. In this work, the interaction of 3,4,9,10-perylene tetracarboxylic dianhydride (PTCDA) with single crystalline Ru(0001) and Ru(1-100) surfaces as well as evaporated thin Ru films is presented. PTCDA molecules are deposited on the Ru surfaces by organic molecular beam epitaxy. The structural and electronic properties of the resulting interfaces are investigated by various surface analytical techniques, including low energy electron diffraction (LEED), scanning tunnelling microscopy (STM), X-ray photoelectron spectroscopy (XPS) and ultraviolet photoelectron spectroscopy (UPS).