Regensburg 2010 – scientific programme
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TT: Fachverband Tiefe Temperaturen
TT 9: SC: Poster Session
TT 9.13: Poster
Monday, March 22, 2010, 14:00–18:00, Poster A
Fabrication of MgB2 thin films by co-sputtering — •Savio Fabretti, Patrick Thomas, Günter Reiss, and Andy Thomas — Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
MgB2 is an intermetallic compound with a high critical temperature of Tc=40K. The simple cristall structure, large coherence lengh and the high critical current density makes thin magnesium diboride films attractive for superconducting applications like Josephson junctions. To fabricate thin MgB2 films, we used a magnetron co-sputtering system with a Mg and a B target respectively. The films were deposited by dc-magnetron sputtering of Mg and rf-magnetron sputtering of B at a low substrate temperature between 210∘C and 260∘C without a post annealing process. The differences in vacuum pressure between Mg and B make it essential that the composition ratio is controlled by different sputtering power of each target. The crystal structure was measured by X-ray diffraction and transport investigations at low temperatures were performed.