Dresden 2011 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 33: Progress in Micro- and Nanopatterning: Techniques and Applications II (Focused Session, jointly with O -- Organisers: Graaf, Hartmann)

DS 33.6: Vortrag

Mittwoch, 16. März 2011, 12:15–12:30, GER 38

ALD Growth of Highly Ordered ZnO Nanotube Arrays with Tunable Structures and Their Device Applications — •Hui Sun, Kin-Mun Wong, Stefan Bartels, Gerhard Wilde, and Yong Lei — Institute of Materials Physics and Center for Nanotechnology, University of Münster, Münster 48149, Germany

Because of the highly ordered feature, anodic alumina membranes have been widely used as nano-templates for growing one-dimensional (1D) nanostructures of various materials. The structural parameters of the template-prepared 1D nanostructures are adjustable including the size, spacing, and aspect ratio of the nanostructures. Recently, we successfully fabricated large-scale ordered arrays of ZnO nanotubes using a synthesizing route combining the template technique and atomic layer deposition (ALD) process. The advantages of the template technique together with the natures of the ALD process (e.g., precisely controllable atomic-scale growing process) results in attractive features of the obtained ZnO nanotube arrays, including tunable tube diameter, wall thickness, length and array density. These nanostructures are of extremely high and variable surface-to-volume ratio, which means that the change of surface status would affect the state of the material significantly. We believe that those constructions will largely enhance the utility of surface electronics devices, such as chemical sensors, biosensors etc., and the structure meets the requirement for conductometric semiconductor gas sensors of high sensitivity. Potential applications, such as photonic detector of super high resolution and band edge mode surface emitting laser are discussed.