Dresden 2011 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films
DS 42.101: Poster
Mittwoch, 16. März 2011, 15:00–17:30, P1
growth, characterization and bio-functionalization of cubic boron nitride thin films — •hong yin1, lianchen shan1, marc saitner1, lars grieten1, sylvia wenmackers1, veronique vermeeren2, fabian wilbers1, marcel ameloot2, luc michiels2, marc d'olieslaeger1,3, patrick wagner1,3, and hans-gerd boyen1 — 1institute for materials research, hasselt university, wetenscharpspark 1, 3590 diepenbeek, belgium — 2biomedical research institute, hasselt university, agoralaan buiding c, 3590 diepenbeek, belgium — 3IMEC, division IMOMEC, wetenscharpspark 1, 3590 diepenbeek, belgium
Beside their applications as superhard coatings, in high-temperature electronics, or UV-photonics, cubic boron nitride (c-BN) thin films are also promising candidates for biological applications due to their bio-compatibility and chemical inertness. In this work, we will demonstrate that c-BN films have the potential to be used as new transducer material for biosensor applications. Impurity-free c-BN films are synthesized by means of radio frequency (r.f.) magnetron sputtering under UHV conditions. In-situ XPS and ex-situ FTIR are used as analytical tools to collect information about both, the surface and the volume parts of the films, respectively. Hydrogen-terminated films are successfully functionalized for the subsequent attachment of (amino-terminated) DNA. The successful attachment of single-stranded DNA and the subsequent hybridization to form double-stranded DNA is confirmed by supernatant fluorescence microscopy.