Dresden 2011 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films
DS 42.104: Poster
Mittwoch, 16. März 2011, 15:00–17:30, P1
Oxidation Of Thin Metal Films For Low-cost Vacuum Quality Monitoring — •Sebastian Mäder1, Ulrich Kunze1, and Theodor Doll2,3 — 1Werkstoffe und Nanoelektronik, Ruhr-Universität Bochum, 44780 Bochum, Germany — 2adlantis Dortmund GmbH, 44263 Dortmund, Germany — 3Institut für Physik, Johannes Gutenberg-Universität Mainz, 55122 Mainz, Germany
Ultrathin metal films are investigated in terms of resistance changes, caused by the decrease of the electrical conductive cross section, for their application as vacuum quality sensors. Almost any pure metal is not stable in an oxygen-rich atmosphere and reacts to a metal oxide. In general, this oxide has a some orders of magnitude higher resistivity and so the growth of an oxide layer reduces the conductive path of the metal layer. For modeling the kinetics of these sensors an extended theory of metal oxidation [1,2] is used where the pressure dependence is explicitly considered. The application field of these sensors is as Vacuum Insulation Panels (VIP), which are good thermal insulators at sufficiently low inside pressure. Aluminum in the thickness range of some up to 20 nm is investigated as a metal with a compact oxide layer wherefore limiting oxide thickness and hence a long lifetime of the sensor is expected. In contrast copper is studied as a metal with a porous oxide structure, in order to yield a great resistance change in short time and therefore a better sensor response.
[1]Boggio, J. E.; Surface Science 14 1 (1969).
[2]Boggio, J. E.; Plumb, R. C.; Surface Science 44 3 (1966).