Dresden 2011 – scientific programme

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DS: Fachverband Dünne Schichten

DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films

DS 42.108: Poster

Wednesday, March 16, 2011, 15:00–17:30, P1

Fabrication and characterization of YSZ microstructures — •Osman Khalil, Markus Piechotka, Martin Fischer, Torsten Henning, and Peter J. Klar — 1. Physikalisches Institut, Justus-Liebig-Universität, 35392 Giessen

Yttria-stabilized zirconia (YSZ) is known for its ion-conducting behaviour due to oxygen vacancies in its anion-lattice. To extract these ions from the surface a three-phase-boundary between air, YSZ and platin is desirable. Thus the conductance of an YSZ sample can be reduced by the use of thin films or by an increase of the three-phase boundary-surface. Therefore we investigated the fabrication of freestanding YSZ membranes grown on silicon by anisotropical etching of (100)-Si-wafers as well as the microstructuring of the YSZ-surface. The treatment of the samples was performed with photolithography, KOH-etching and Ar⁺-ion-beam-etching. The samples were then investigated using AFM, SEM and optical microscopy.