Dresden 2011 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films

DS 42.109: Poster

Mittwoch, 16. März 2011, 15:00–17:30, P1

Improvement and investigation of the emission behaviour of YSZ samples using nanostructuring and thin film technology — •Markus Piechotka, Martin Fischer, Torsten Henning, Davar Feili, and Peter J Klar — 1. Physikalisches Institut, Justus-Liebig-Universität, 35392 Giessen

We developed nano-structured free-standing YSZ-membranes for electrospray applications as well as for ion emitting purposes. YSZ is a well known solid electrolyte used widely in the production of solid oxide fuel cells (SOFC) as well as as electroceramics and possible ion emitter. Especially in the field of micro-thrust space engines, new techniques of ion emission have to be developed.

100 nm to 2 microns thin YSZ films were grown on double-side polished and thermally oxidized 2 inch silicon wafer using PLD. Subsequently photolithography structuring and wet etching with BHF and KOH were performed to lay the membrane bare. Afterwards needle structures were transferred into the YSZ-membranes using electron beam lithography followed by ion-beam etching with an Ar⁺-beam.

The surfaces of the structured samples were investigated using AFM as well as SEM. The samples were then mounted into an integrated sample holder with multiple high voltage grids in front of the sample. This assembly functions as a solid state ion emitter with a heater as well as an oxygen supply beneath the sample. Furthermore we emitted oxygen ions from the YSZ-surface and measured the temperature dependence of the emission current as well as the ion energy distribution with Faraday cups and with a retarding potential analyser.