Dresden 2011 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films

DS 42.59: Poster

Mittwoch, 16. März 2011, 15:00–17:30, P1

Local elemental and surface chemistry analysis of laser-nanostructured thin Au films — •Jürgen W. Gerlach, Marisa Mäder, Thomas Höche, Dietmar Hirsch, and Bernd Rauschenbach — Leibniz-Institut für Oberflächenmodifizierung, 04318 Leipzig

A regular arrangement of substrate-bound Au dots in fields of about 100 μm x 100 μm in size was obtained by structuring a thin Au film, which was deposited on a sapphire substrate, by Diffraction Mask Projection Laser Ablation (DiMPLA) [1]. Typical dot diameters of 150 nm to 200 nm resulted. Transmission electron microscopy revealed that during the structuring process with a single excimer laser pulse (KrF, 248 nm wavelength, 25 ns pulse length) the near-surface region of the single crystalline substrate melted and the Au dots were drawn partially or fully into the superficially molten substrate. Eventually, the Au dots were in parts embedded in the then amorphous near surface region of the substrate. In the present study, such fields of well-arranged Au dots on sapphire are investigated regarding the lateral elemental distribution as well as the surface chemistry by photoelectron spectroscopy. The results of elemental parallel imaging and small spot electron spectroscopy are compared with the actual distribution of Au dots in the structured fields as obtained by scanning electron microscopy. The presented results are discussed regarding localized charging effects or alternatively the formation of gold oxide. In the latter case, reaction of the Au dots with oxygen from the surrounding air during the laser structuring process has to be taken into account.

[1] M. Mäder et al., Phys. Stat. Sol. B, 247 (2010) 1372.