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DS: Fachverband Dünne Schichten

DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films

DS 42.83: Poster

Mittwoch, 16. März 2011, 15:00–17:30, P1

Significant stress reduction of cBN layers upon ion irradiation at elevated temperatures — •Stefan Weidner¹, Sebastian Geburt¹, Jian Ye², Sven Ulrich², and Carsten Ronning¹ — ¹Institut für Festkörperphysik, Friedrich-Schiller-Universität Jena — ²Institut für Materialforschung, Forschungszentrum Karlsruhe

Cubic boron nitride (cBN) is the hardest materials beneath diamond and exceeds the properties in terms of chemical resistivity, making it a promising candidate for ultra-hard coatings in extreme environments. Due to the ion assisted growth process, the cBN layers suffer from an intrinsic stress, which limits the layer thickness and therefore possible industrial applications.

To investigate new approaches for the synthesis of low stress cBN layers, we applied ion irradiation with various ion species (O, Ne, Kr) and at different temperatures between 300 to 600 K to cBN:O layers [1]. The intrinsic stress and the cBN content were monitored by profilometer and FTIR after each implantation step. As expected, ion irradiation at room temperature leads to a stress reduction with constant cBN content upon an ion induced damage up to 0.5 dpa [2], but a severe damage is introduced to the layer above this value resulting into a phase transition to hBN. However, irradiation at elevated temperatures results in a significant stress reduction without decrease of the cBN quality even up to 4.3 dpa.

[1] Ye at al. Thin Solid Films 517(3), 2008, p.1151-1155

[2] Widmayer et al., Diamond and Related Materials 6, 1997, p. 621-625