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DS: Fachverband Dünne Schichten

DS 42: Poster I: Progress in Micro- and Nanopatterning: Techniques and Applications (jointly with O); Spins in Organic Materials; Ion Interactions with Nano Scale Materials; Organic Electronics and Photovoltaics; Plasmonics and Nanophotonics (jointly with HL and O); High-k and Low-k Dielectrics (jointly with DF); Organic Thin Films; Nanoengineered Thin Films; Layer Deposition Processes; Layer Properties: Electrical, Optical, and Mechanical Properties; Thin Film Characterisation: Structure Analysis and Composition; Application of Thin Films

DS 42.86: Poster

Mittwoch, 16. März 2011, 15:00–17:30, P1

Picosecond-Pulsed Laser Deposition of Ge₂Sb₂Te₅ — •Julia Benke, Erik Thelander, and Bernd Rauschenbach — Leibniz Institute of Surface Modification, Leipzig

The chalcogenide compound Ge₂Sb₂Te₅ (GST) is a commonly used material for phase change applications like PC-RAM and optical data storage [1]. Here, we present thin films of GST synthesized by Pulsed Laser Deposition (PLD) using a picosecond laser. The use of ultrashort pulses drastically changes the ablation mechanism compared to conventional PLD and hence another type of film morphology is to be expected [2]. Samples have been deposited on glass and SiO₂ in an UHV-chamber in different inert gas environments. The influence of substrate temperature and target-to-substrate distance on the surface topography has been investigated and characterized with SEM and AFM whereas structural information has been obtained with XRD, XPS and RBS.
Raoux S., Annu. Rev. Mater. Res., 48, (2009), 39:25
Teghil et al., Appl. Surf. Sci., 210 (2003), 307